MEMS

At the end of this course, students will be able to:
•    understand the techniques used to implement mobile objects
•    understand the different stages of MEMS design and mechanical analysis
•    dimension a MEMS that meets criteria for switching speed, switching voltage, and reliability.
•    extract an electrical behavioral model of the MEMS
•    use MEMS to design an original RF function with tunable electrical characteristics.

    MEMS: What are they?

    Application of MEMS in the following fields:

        Optics

        Mechatronics

        Medical

        RF

    Clean room technology concepts

    Mechanical model of MEMS:

        Static model

        Dynamic model

    RF modeling of MEMS

    Example of a MEMS-RF design procedure

Application project: Design of a tunable RF system using a V-band (60GHz) MEMS

    Implementation of an electromagnetic model of MEMS (HFSS)

    Extraction of the electrical model (ADS) and application of a parametric model for the design of a tunable bandpass filter from 60GHz to 40 GHz.

    Definition of a tunable function to be designed, implemented, and validated by simulation.